WSU’s cleanroom is a microfabrication lab that is available to industry and academic entities alike for research, technology development, process development and prototyping. It is approximately 1000 sq. ft. and is a Class 1000.
The Center for Materials Research directs the cleanroom laboratory which is located in the Engineering, Teaching & Research Laboratory building on the WSU Pullman campus.
Keywords: Atomic Layer Deposition, ALD, nanofabrication, MEMS, NEMS, cleanroom, microfabrication, microelectronics, MEMS sensor, nanotechnology, MEMS sensor, MEMS accelerometer, MEMS switch, photolithography, sputter, mask aligner, ellipsometer, profiler, stylus, profilometer, wet etch, deep reactive ion etching, DRIE, RIE, plasma etching, oxidation, SiO2, boron diffusion, microscopy, AFM, atomic force microscope, SEM, scanning electron microscope, probe, nanoindentation, thin films, bioengineering, microchannel, microfluidics, washington cleanroom, prototype, MEMS technology, micromachining, class 1000, class 100, particle counting, patent
For further information please contact Joshah Jennings at (509) 335-8145 or email@example.com
The microfabrication cleanroom is located in ETRL 002 on the Washington State University campus in Pullman, Washington. ETRL is located just west of Dana at the corner of College Ave and Spokane St.