Fees
Washington State University Microfabrication Cleanroom Rates
(effective February 1, 2018)
| EQUIPMENT | Hourly User Rate | Hourly Industry Rate |
|---|---|---|
| Atomic Layer Deposition | $70 | $76 |
| Deep Reactive Ion Etcher | $125 | $136 |
| Ellipsometer | $25 | $27 |
| General PC | $5 | $5 |
| Horizontal Tube Furnace | $35 | $38 |
| Leitz Microscope | $5 | $5 |
| Mask Aligner | $30 | $33 |
| Plasma Etcher | $45 | $49 |
| Profilometer | $25 | $27 |
| Rapid Thermal Annealer | $45 | $49 |
| Reactive Ion Etcher | $50 | $54 |
| Heat Press | $15 | $16 |
| Spin Coater | $35 | $38 |
| Spin Coater w/ Chemicals | $65 | $71 |
| UNIQUE EQUIPMENT RATES | ||
| Photolithography Discount | ||
| Per Hour | $80 | $87 |
| Sputter Machine Per Cycle | ||
| Per Cycle | $350 | $380 |
| Equipment Cap | ||
| Monthly Cap | $2,500 | $3,825 |
| LAB FEES | ||
| Supplies Fee | ||
| Per Month | $100 | $109 |
| Yearly Cap | $1,000 | $1,087 |
| Cleanup Fee | ||
| Per Instance | $100 | $109 |
| Labor Rate | ||
| Per Hour | $120 | $130 |
General Notes:
- All users will pay the Supplies Fee plus any hourly equipment fees they incur.
- Equipment and labor rates are billed at a 1-hour minimum and ¼ hour increments.
- Processes done by lab staff will be billed at the labor rate plus the equipment rate.
- Equipment training will be billed at the Labor Rate.
- No user will be charged more than the Monthly Equipment Cap per billing cycle.
- Any user not cleaning up according to training will be charged the Cleanup Fee and issued a cleanroom violation.
- The Photolithography discount includes use of Spin Coater, Mask Aligner, Leitz Microscope, and Chemicals.
You can reach us for further information at: (509) 335-8145 or cleanroom.imr@wsu.edu