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Institute for Materials Research Institute of Materials Research

Microfabrication Cleanroom

About Us

IMR maintains and operates a micro-electro-mechanical systems (MEMS) fabrication facility located on the Pullman, WSU, campus in the Engineering Teaching and Research Laboratory building. It is a class 1000 cleanroom that is approximately 1000 ft2.

A brief description of the available equipment is described here and shown in the map below. The facility houses typical MEMS fabrication instruments and equipment which includes a spin coater, mask aligner, wet benches, sputter machine, reactive ion etcher, deep reactive ion etcher, plasma etcher, profilometer, ellipsometer, tube furnaces and a rapid thermal processor. The sputtering machine is an Edwards Auto 306 and is able to deposit thin, uniform layers via chemical vapor deposition (CVD). The sputter machine utilizes two power supplies (DC and RF) and two magnetron sputter guns. Also, the machine has a thin film thickness monitor that can accurately calculate film thicknesses to the order of tens of nanometers. We also have an Atomic Layer Deposition (ALD) machine.


Keywords: Atomic Layer Deposition, ALD, nanofabrication, MEMS, NEMS, cleanroom, microfabrication, microelectronics, MEMS sensor, nanotechnology, MEMS sensor, MEMS accelerometer, MEMS switch, photolithography, sputter, mask aligner, ellipsometer, profiler, stylus, profilometer, wet etch, deep reactive ion etching, DRIE, RIE, plasma etching, oxidation, SiO2, boron diffusion, microscopy, AFM, atomic force microscope, SEM, scanning electron microscope, probe, nanoindentation, thin films, bioengineering, microchannel, microfluidics, washington cleanroom, prototype, MEMS technology, micromachining, class 1000, class 100, particle counting, patent

For further information please contact Marc Weber at (509) 335-8145 or cleanroom.imr@wsu.edu


Directions

The microfabrication cleanroom is located inĀ ETRLĀ 002 on the Washington State University campus in Pullman, Washington. ETRL is located just west of Dana at the corner of College Ave and Spokane St.