Fees

Washington State University Microfabrication Cleanroom Rates

(effective February 1, 2018)

EQUIPMENT	Hourly User Rate	Hourly Industry Rate
Atomic Layer Deposition	$70	$76
Deep Reactive Ion Etcher	$125	$136
Ellipsometer	$25	$27
General PC	$5	$5
Horizontal Tube Furnace	$35	$38
Leitz Microscope	$5	$5
Mask Aligner	$30	$33
Plasma Etcher	$45	$49
Profilometer	$25	$27
Rapid Thermal Annealer	$45	$49
Reactive Ion Etcher	$50	$54
Heat Press	$15	$16
Spin Coater	$35	$38
Spin Coater w/ Chemicals	$65	$71
UNIQUE EQUIPMENT RATES
Photolithography Discount
Per Hour	$80	$87
Sputter Machine Per Cycle
Per Cycle	$350	$380
Equipment Cap
Monthly Cap	$2,500	$3,825
LAB  FEES
Supplies Fee
Per Month	$100	$109
Yearly Cap	$1,000	$1,087
Cleanup Fee
Per Instance	$100	$109
Labor Rate
Per Hour	$120	$130

General Notes:

1. All users will pay the Supplies Fee plus any hourly equipment fees they incur.
2. Equipment and labor rates are billed at a 1-hour minimum and ¼ hour increments.
3. Processes done by lab staff will be billed at the labor rate plus the equipment rate.
4. Equipment training will be billed at the Labor Rate.
5. No user will be charged more than the Monthly Equipment Cap per billing cycle.
6. Any user not cleaning up according to training will be charged the Cleanup Fee and issued a cleanroom violation.
7. The Photolithography discount includes use of Spin Coater, Mask Aligner, Leitz Microscope, and Chemicals.

You can reach us for further information at: (509) 335-8145 or cleanroom.imr@wsu.edu